Design and fabrication of micromirror array supported by vertical springs
Jong-Woo Shin, Seok-Whan Chung, Yong-Kweon Kim, Bum Kyoo ChoiVolume:
66
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01762-7
File:
PDF, 636 KB
english, 1998