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A vertically integrated media-isolated absolute pressure sensor
K. Goldman, G. Gritt, I. Baskett, W. Czarnocki, A. Ramirez, C. Brown, D. Hughes, D. Wallace, M. ShahVolume:
66
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)01765-2
File:
PDF, 501 KB
english, 1998