Oxidized porous silicon: a new approach in support thermal...

Sensors and Actuators A: Physical 1998 Vol. 67; Iss. 1-3

Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors

V. Lysenko, Ph. Roussel, G. Delhomme, V. Rossokhaty, V. Strikha, A. Dittmar, D. Barbier, N. Jaffrezic-Renault, C. Martelet
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Volume:
67
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01777-9
File:
PDF, 659 KB
english, 1998
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