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An integrated force-balanced capacitive accelerometer for low-g applications
K.H.-L Chau, S.R Lewis, Y Zhao, R.T Howe, S.F Bart, R.G MarcheselliVolume:
54
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)80006-4
File:
PDF, 336 KB
english, 1996