Volume 54; Issue 1-3

Sensors and Actuators A: Physical

Volume 54; Issue 1-3

1

On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones

M Pedersen, W Olthuis, P Bergveld

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 337 KB

english, 1996

2

Silicon three-axial tactile sensor

Z Chu, P.M Sarro, S Middelhoek

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 387 KB

english, 1996

3

CMOS-compatible traction stress sensor for use in high-resolution tactile imaging

Bart J Kane, Mark R Cutkosky, Gregory T.A Kovacs

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 389 KB

english, 1996

4

Improvement of novel NRLM method for accelerometer characterization to the range 102 m s−2

Kazunaga Ueda, Akira Umeda

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 319 KB

english, 1996

5

ISAAC: integrated silicon automotive accelerometer

Leland ‘Chip’ Spangler, Christopher J Kemp

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 508 KB

english, 1996

6

Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Ph Luginbuhl, G.-A Racine, Ph Lerch, B Romanowicz, K.G Brooks, N.F de Rooij, Ph Renaud, N Setter

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 310 KB

english, 1996

7

Deformable micromirror devices as phase-modulating high-resolution light valves

H Kück, W Doleschal, A Gehner, W Grundke, R Melcher, J Paufler, R Seltmann, G Zimmer

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 511 KB

english, 1996

8

Editorial Board

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 31 KB

english, 1996

9

A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

R Gottfried-Gottfried, W Budde, R Jähne, H Kück, B Sauer, S Ulbricht, U Wende

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 277 KB

english, 1996

10

Local positioning system by means of enclosing signal field

Shinji Ohyama, Akira Kobayashi

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 386 KB

english, 1996

11

Design and fabrication of micromirror supported by electroplated nickel posts

Seok-Whan Chung, Jong-Woo Shin, Yong-Kweon Kim, Bong-Soo Han

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 398 KB

english, 1996

12

Silicon-based thermal comfort sensing device

Jong-Uk Bu, Tae-Yoon Kim, In-Sik Kim, Young-Sam Jun, Young-Cho Shim, Sung-Tae Kim

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 230 KB

english, 1996

13

An integrated force-balanced capacitive accelerometer for low-g applications

K.H.-L Chau, S.R Lewis, Y Zhao, R.T Howe, S.F Bart, R.G Marcheselli

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 336 KB

english, 1996

14

Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy

Toshihiro Itoh, Tadatomo Suga

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 287 KB

english, 1996

15

Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

Samuel K.H Fung, Zhenan Tang, Philip C.H Chan, Johnny K.O Sin, Peter W Cheung

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 404 KB

english, 1996

16

A pressure sensor based on a nitride membrane using single-crystalline piezoresistors

Bernd Folkmer, Peter Steiner, Walter Lang

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 398 KB

english, 1996

17

A new CdZnTe detector system for low-energy gamma-ray measurement

G.A Johansen, E Åbro

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 349 KB

english, 1996

18

Silicon microfabricated horns for power ultrasonics

Amit Lal, Richard M White

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 348 KB

english, 1996

19

Micro gas-flow sensor with integrated heat sink and flow guide

Li Qiu, Stefan Hein, Ernst Obermeier, Axel Schubert

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 361 KB

english, 1996

20

The μ-flown: a novel device for measuring acoustic flows

Hans-Elias de Bree, Peter Leussink, Twan Korthorst, Henri Jansen, Theo S.J Lammerink, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 307 KB

english, 1996

21

Silicon tube structures for a fluid-density sensor

Peter Enoksson, Göran Stemme, Erik Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 311 KB

english, 1996

22

An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flow

R Kersjes, F Liebscher, E Spiegel, Y Manoli, W Mokwa

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 333 KB

english, 1996

23

Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

K Maenaka, T Fujita, Y Konishi, M Maeda

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 340 KB

english, 1996

24

Quasianalog accelerometer using microswitch array

J Noetzel, T Tønnesen, W Benecke, J Binder, G Mader

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 340 KB

english, 1996

25

Snapping microswitches with adjustable acceleration threshold

Jeung Sang Go, Young-Ho Cho, Byung Man Kwak, Kwanhum Park

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 338 KB

english, 1996

26

2D magnetodiode sensors based on SOS technology

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 287 KB

english, 1996

27

Monochromatic excitation of surface plasmon resonance in an optical-fibre refractive-index sensor

C Ronot-Trioli, A Trouillet, C Veillas, H Gagnaire

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 323 KB

english, 1996

28

Microfabricated high-energy particle detector

J Han, R.L Smith, R Lander

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 416 KB

english, 1996

29

A thermoelectric infrared radiation sensor with monolithically integrated amplifier stage and temperature sensor

M Müller, W Budde, R Gottfried-Gottfried, A Hübel, R Jähne, H Kück

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 314 KB

english, 1996

30

An active, microfabricated, scalp electrode array for EEG recording

Babak Alizadeh-Taheri, Rosemary L Smith, Robert T Knight

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 404 KB

english, 1996

31

High-resolution micro-fluxgate sensing elements using closely coupled coil structures

Shoji Kawahito, Hiroshi Satoh, Masayaki Sutoh, Yoshiaki Todokoro

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 406 KB

english, 1996

32

A new sensor principle based on the reflection of surface acoustic waves

Holger Becker, Manfred von Schickfus, Siegfried Hunklinger

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 255 KB

english, 1996

33

A fiber-optic silicon pressure sensor for ultra-thin catheters

O Tohyama, M Kohashi, K Yamamoto, H Itoh

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 233 KB

english, 1996

34

A polysilicon flow sensor for gas flow meters

Tokudai Neda, Kenichi Nakamura, Tsugihiko Takumi

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 397 KB

english, 1996

35

Simulation of a complex sensor system using coupled simulation programs

Andreas Schroth, Torsten Blochwitz, Gerald Gerlach

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 227 KB

english, 1996

36

Minimum detectable signals of integrated magnetic sensors in bulk CMOS and SOI technologies for magnetic read heads

Jack Lau, Cuong T Nguyen, Ping K Ko, Philip C.H Chan

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 320 KB

english, 1996

37

Highly sensitive mangetotransistor with combined phenomena of Hall effect and emitter injection modulation operated in the saturation mode

Uk-Song Kang, Seung-Ki Lee, Min-Koo Han

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 260 KB

english, 1996

38

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 287 KB

english, 1996

39

An accelerometer made in a two-layer surface-micromachining technology

J Fricke, E Obermeier

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 351 KB

english, 1996

40

A novel method to avoid sticking of surface-micromachined structures

F Kozlowski, N Lindmair, Th Scheiter, C Hierold, W Lang

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 302 KB

english, 1996

41

Microcoils fabricated by UV depth lithography and galvanoplating

B Löchel, A Maciossek, M Rothe, W Windbracke

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 433 KB

english, 1996

42

High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through

G.J Burger, E.J.T Smulders, J.W Berenschot, T.S.J Lammerink, J.H.J Fluitman, S Imai

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 408 KB

english, 1996

43

Thick polycrystalline silicon for surface-micromechanical applications: deposition, structuring and mechanical characterization

P. Lange, M. Kirsten, W. Riethmüller, B. Wenk, G. Zwicker, J.R. Morante, F. Ericson, J.Å. Schweitz

Journal:

Sensors and Actuators A: Physical

Year:

1996

File:

PDF, 1.68 MB

1996

44

Silicon-on-insulator (SOI) movable integrated optical waveguide technology

S.C. Kan, T.T.H. Eng, S.S.Y. Sin, G.K.L. Wong

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 245 KB

english, 1996

45

The quantitative determination of the residual stress profile in oxidized p+ silicon films

E.H. Yang, S.S. Yang

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 377 KB

english, 1996

46

Limitations to the piezoelectric effect for materials with finite resistivity

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 315 KB

english, 1996

47

Properties of heteroepitaxial 3C-SiC films grown by LPCVD

Yoh-ichi Yamaguchi, Hiroyuki Nagasawa, Tsutomu Shoki, Norimichi Annaka, Hideaki Mitsui

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 312 KB

english, 1996

48

Electrical and piezoresistive characterization of boron-doped LPCVD polycrystalline silicon under rapid thermal annealing

M. Le Berre, P. Kleimann, B. Semmache, D. Barbier, P. Pinard

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 201 KB

english, 1996

49

A planar microfabricated fluid filter

James P. Brody, Thor D. Osborn, Fred K. Forster, Paul Yager

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 411 KB

english, 1996

50

Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback

J. Mark Noworolski, Erno Klaassen, John Logan, Kurt Petersen, Nadim I. Maluf

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 377 KB

english, 1996

51

Highly reliable silicon micromachined physical sensors in mass production

Takao Sasayama, Seikoo Suzuki, Shigeki Tsuchitani, Akira Koide, Masayoshi Suzuki, Terumi Nakazawa, Norio Ichikawa

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 294 KB

english, 1996

52

Stress-profile characterization and test-structure analysis of single and double ion-implanted LPCVD polycrystalline silicon

M.A. Benítez, L. Fonseca, J. Esteve, M.S. Benrakkad, J.R. Morante, J. Samitier, J.A. Schweitz

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 455 KB

english, 1996

53

A novel low-field electron-emission polycrystalline diamond microtip array for sensor applications

W.P. Kang, J.L. Davidson, Q. Li, J.F. Xu, D.L. Kinser, D.V. Kerns

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 250 KB

english, 1996

54

Boron etch-stop in TMAH solutions

Elin Steinsland, Martin Nese, Anders Hanneborg, Ralph W. Bernstein, Halle Sandmo, Gjermund Kittilsland

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 313 KB

english, 1996

55

A new fabrication process of a planar coil using photosensitive polyimide and electroplating

Y. Watanabe, M. Edo, H. Nakazawa, E. Yonezawa

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 450 KB

english, 1996

56

Electrical levitation for micromotors, microgyroscopes and microaccelerometers

G. He, K. Chen, S. Tan, W. Wang

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 257 KB

english, 1996

57

A bistable pneumatic microswitch for driving fluidic components

T. Lisec, M. Kreutzer, B. Wagner

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 278 KB

english, 1996

58

Determination of the mechanical properties of microstructures

X.Y. Ye, Z.Y. Zhou, Y. Yang, J.H. Zhang, J. Yao

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 255 KB

english, 1996

59

A practical microgripper by fine alignment, eutectic bonding and SMA actuation

Abraham P. Lee, Dino R. Ciarlo, Peter A. Krulevitch, Stacy Lehew, Jimmy Trevino, M.Allen Northrup

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 394 KB

english, 1996

60

Bending and expanding motion actuators

Takaharu Idogaki, Takayuki Tominaga, Kouji Senda, Nobuyuki Ohya, Tadashi Hattori

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 293 KB

english, 1996

61

An experimental study of rotating micromechanical liquid O-ring pressure seals

Sidra Cohen, E.P. Muntz

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 567 KB

english, 1996

62

An integrated multichannel charged-particle sensing system

J.V. Hatfield, P.J. Hicks, D.G. Lomas, J. Comer

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 364 KB

english, 1996

63

LIGA and related technologies for industrial application

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 411 KB

english, 1996

64

Optical properties of the integrated infrared sensor

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 261 KB

english, 1996

65

On the measurement of thin liquid overlayers with the quartz-crystal microbalance

Michael Rodahl, Bengt Kasemo

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 610 KB

english, 1996