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Thick polycrystalline silicon for surface-micromechanical applications: deposition, structuring and mechanical characterization
P. Lange, M. Kirsten, W. Riethmüller, B. Wenk, G. Zwicker, J.R. Morante, F. Ericson, J.Å. SchweitzVolume:
54
Year:
1996
Pages:
5
DOI:
10.1016/s0924-4247(97)80036-2
File:
PDF, 1.68 MB
1996