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Electrical and piezoresistive characterization of boron-doped LPCVD polycrystalline silicon under rapid thermal annealing
M. Le Berre, P. Kleimann, B. Semmache, D. Barbier, P. PinardVolume:
54
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(97)80041-6
File:
PDF, 201 KB
english, 1996