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Highly reliable silicon micromachined physical sensors in mass production
Takao Sasayama, Seikoo Suzuki, Shigeki Tsuchitani, Akira Koide, Masayoshi Suzuki, Terumi Nakazawa, Norio IchikawaVolume:
54
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(97)80044-1
File:
PDF, 294 KB
english, 1996