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Vacuum sealing of microcavities using metal evaporation
M. Bartek, J.A. Foerster, R.F. WolffenbuttelVolume:
61
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)80290-7
File:
PDF, 741 KB
english, 1997