Volume 61; Issue 1-3

Sensors and Actuators A: Physical

Volume 61; Issue 1-3

1

Multisegment magnetoresistive sensor based on the GMR effect

P. Lobotka, P. Krivošík, I. Va´vra, M. Durec, R. Schad, G. Verbanck, Y. Bruynseraede

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 395 KB

english, 1997

2

A linear array of photodetectors with wide dynamic range and near photon quantum-noise limit

J.M. Raynor, P. Seitz

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 352 KB

english, 1997

3

Sensor for high-air-humidity measurement

V. Matko, D. Donlagic

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 210 KB

english, 1997

4

Gas damping of electrostatically excited resonators

Thierry Corman, Peter Enoksson, Go¨ran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 694 KB

english, 1997

5

Ultrasonic sensor for liquid-level inspection in bottles

E. Vargas, R. Ceres, J.M. Marti´n, L. Caldero´n

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 279 KB

english, 1997

6

Possibilities and limitations in quantitative determination of polymer shear parameters by TSM resonators

Carsten Behling, Ralf Lucklum, Peter Hauptmann

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 426 KB

english, 1997

7

An integrated silicon interferometric temperature sensor

G. Cocorullo, F.G. Della Corte, M. Iodice, I. Rendina, P.M. Sarro

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 714 KB

english, 1997

8

Planar fluxgate sensors: experimental data and theoretical analysis

Ulrich Wende, Detlef Kunze, Ralf Gottfried-Gottfried

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 390 KB

english, 1997

9

Love wave acoustic immunosensor operating in liquid

G.L. Harding, J. Du, P.R. Dencher, D. Barnett, E. Howe

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 539 KB

english, 1997

10

Dynamic behaviour of a quartz extensional-mode non-tactile profile sensor

M. Giousouf, M. Weinmann, W. Scheerer, F. Assmus, W.v. Mu¨nch

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 821 KB

english, 1997

11

A hierarchical smart-pixel array for feature extraction with on-chip storage

Rainer Hoehler, Kai Rothmann, Hans Strack

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.25 MB

english, 1997

12

Fabrication and analysis of a thick-film humidity sensor based on MnWO4

U. Dellwo, P. Keller, J.-U. Meyer

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 461 KB

english, 1997

13

Design, realization and characterization of a symmetrical triaxial capacitive accelerometer for medical applications

J.C. Lo¨tters, W. Olthuis, P.H. Veltink, P. Bergveld

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 583 KB

english, 1997

14

Two-channel SAW sensor signal-transmission system

J. Enderlein, S. Bechstein, J. Scho¨nberg, E. Chilla, H.-J. Fro¨lich

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 299 KB

english, 1997

15

AlAs/GaAs layered structures for SAW sensors

F. Jungnickel, S. Makarov, E. Chilla, H.-J. Fro¨hlich

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 350 KB

english, 1997

16

Comparison of a conventional with an advanced micromachined flexible-fuel sensor

T. Hofmann, F. Beckmann, S. Michaelis, J. Zacheja, J. Binder, S. Tagliante

Journal:

Sensors and Actuators A: Physical

Year:

1997

File:

PDF, 1006 KB

1997

17

An optoelectronic sensor system for industrial multipoint and imaging spectrometry

Esko Herrala, Timo Hyva¨rinen, Osmo Voutilainen, Jorma Lammasniemi

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 461 KB

english, 1997

18

A micromachined silicon magnetometer

F. Ayela, T. Fournier, J. Chaussy

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 181 KB

english, 1997

19

New FET accelerometer based on surface micromachining

J.A. Plaza, M.A. Benitez, J. Esteve, E. Lora-Tamayo

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 666 KB

english, 1997

20

Measurement and modelling of sensitivity and noise of MOS magnetic field-effect transistors

Dirk Killat, Johannes v. Kluge, Frank Umbach, Werner Langheinrich, Richard Schmitz

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 710 KB

english, 1997

21

Inorganic electret membrane for a silicon microphone

Christiane Thielemann, Gisela Hess

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 338 KB

english, 1997

22

A ‘when and where’ charged-particle sensing system

J.V. Hatfield, P.J. Hicks, J. Goldfinch

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 769 KB

english, 1997

23

Gallium phosphate, GaPO4: a new piezoelectric crystal material for high-temperature sensorics

P. Krempl, G. Schleinzer, W. Wallno¨fer

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 384 KB

english, 1997

24

Vacuum sealing of microcavities using metal evaporation

M. Bartek, J.A. Foerster, R.F. Wolffenbuttel

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 741 KB

english, 1997

25

Writing FIB implantation and subsequent anisotropic wet chemical etching for fabrication of 3D structures in silicon

B. Schmidt, L. Bischoff, J. Teichert

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 988 KB

english, 1997

26

Highly phosphorus-doped polysilicon films with low tensile stress for surface micromachining using POCl3 diffusion doping

L. Elbrecht, R. Catanescu, J. Zacheja, J. Binder

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 655 KB

english, 1997

27

Microstructing of silicon by electro-discharge machining (EDM) — part II: applications

Paul-Henri's Heeren, Dominiek Reynaerts, Hendrik Van Brussel, Cynthia Beuret, Olle Larsson, Axel Bertholds

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.68 MB

english, 1997

28

Ternary TaSiN films for sensors and actuators

C. Linder, A. Dommann, G. Staufert, M.-A. Nicolet

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 885 KB

english, 1997

29

Low-cost HARMS process

Roger Bischofberger, Heinrich Zimmermann, Gerhard Staufert

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 2.30 MB

english, 1997

30

Mechanical sensors based on laser-recrystallized SOI structures

A. Druzhinin, E. Lavitska, I. Maryamova, V. Voronin

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 354 KB

english, 1997

31

Chemical etching of Y-rotated quartz plates: experiments and theoretical approach

T. Leblois, C.R. Tellier, T. Messaoudi

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 2.09 MB

english, 1997

32

The effect of additives on the adsorption properties of porous silicon

G.M. O'Halloran, M. Kuhl, P.J. Trimp, P.J. French

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 725 KB

english, 1997

33

An integrated charge amplifier for a pyroelectric sensor

D. Setiadi, A. Armitage, T.D. Binnie, P.P.L. Regtien, P.M. Sarro

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.00 MB

english, 1997

34

Virtual instrumentation and intelligent sensors

A.H. Taner, J.E. Brignell

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.18 MB

english, 1997

35

Smart card for detection of alpha radiation

H. Gra¨tz, W.J. Fischer, U. Marschner, T. Streil

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 577 KB

english, 1997

36

Planar-assembly triaxial microaccelerometer with electromechanical sigma-delta ADCs

S. Wuestling, O. Fromhein, H. Gemmeke, M. Tschuch, O. Wollersheim

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 854 KB

english, 1997

37

Colour-sensor system with a frequency output and an ISS or I2C bus interface

G. de Graaf, F.R. Riedijk, R.F. Wolffenbuttel

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 479 KB

english, 1997

38

Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component

C. Marxer, M.-A. Gre´tillat, N.F. de Rooij, R. Ba¨ttig, O. Anthamatten, B. Valk, P. Vogel

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.21 MB

english, 1997

39

An implantable drug-delivery system based on shape memory alloy micro-actuation

Dominiek Reynaerts, Jan Peirs, Hendrik Van Brussel

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 1.12 MB

english, 1997

40

On the response-time behaviour of laser micromachined NiTi shape memory actuators

M. Rohde, A. Schu¨ssler

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 664 KB

english, 1997

41

Modelling and testing of a frictionless levitated micromotor

C.B. Williams, C. Shearwood, P.H. Mellor, R.B. Yates

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 559 KB

english, 1997

42

Editorial Board

Journal:

Sensors and Actuators A: Physical

Year:

1997

File:

PDF, 41 KB

1997

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