Global model generation for a capacitive silicon accelerometer by finite-element analysis
Y. Ansel, B. Romanowicz, P. Renaud, G. SchröpferVolume:
67
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(98)00011-9
File:
PDF, 618 KB
english, 1998