Full integration of a pressure-sensor system into a standard BiCMOS process
T. Scheiter, H. Kapels, K.-G. Oppermann, M. Steger, C. Hierold, W.M. Werner, H.-J. TimmeVolume:
67
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00029-6
File:
PDF, 452 KB
english, 1998