An integrated thermopile structure with high responsivity...

Sensors and Actuators A: Physical 1998 Vol. 66; Iss. 1-3

An integrated thermopile structure with high responsivity using any standard CMOS process

Tayfun Akin, Zeynel Olgun, Orhan Akar, Haluk Kulah
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Volume:
66
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(98)00038-7
File:
PDF, 970 KB
english, 1998
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