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Efficient design and optimization of MEMS by integrating commercial simulation tools
Oliver Nagler, Michael Trost, Bernd Hillerich, Frank KozlowskiVolume:
66
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(98)00052-1
File:
PDF, 689 KB
english, 1998