A MEMS electrostatic particle transportation system

Sensors and Actuators A: Physical 1999 Vol. 73; Iss. 1-2

A MEMS electrostatic particle transportation system

Amish Desai, Sang-Wook Lee, Yu-Chong Tai
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Volume:
73
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(98)00252-0
File:
PDF, 1.72 MB
english, 1999
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