Volume 73; Issue 1-2

Sensors and Actuators A: Physical

Volume 73; Issue 1-2

1

Dual-axis microgyroscope with closed-loop detection

S. An, Y.S. Oh, K.Y. Park, S.S. Lee, C.M. Song

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.73 MB

english, 1999

2

Thermal flow sensor for liquids and gases based on combinations of two principles

M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 863 KB

english, 1999

3

3D microfabrication by combining microstereolithography and thick resist UV lithography

A. Bertsch, H. Lorenz, P. Renaud

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.75 MB

english, 1999

4

Diamond replicas from microstructured silicon masters

H. Björkman, P. Rangsten, P. Hollman, K. Hjort

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 685 KB

english, 1999

5

Mesoscale actuator device: micro interlocking mechanism to transfer macro load

Quanfang Chen, Da-Jeng Yao, Chang-Jin `CJ' Kim, Greg P. Carman

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.23 MB

english, 1999

6

A MEMS electrostatic particle transportation system

Amish Desai, Sang-Wook Lee, Yu-Chong Tai

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.72 MB

english, 1999

7

A new silicon rate gyroscope

W. Geiger, B. Folkmer, J. Merz, H. Sandmaier, W. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.38 MB

english, 1999

8

Experimental evaluation of anodic bonding process based on the Taguchi analysis of interfacial fracture toughness

Jeung Sang Go, Young-Ho Cho

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 443 KB

english, 1999

9

Low power integrated pressure sensor system for medical applications

C Hierold, B Clasbrummel, D Behrend, T Scheiter, M Steger, K Oppermann, H Kapels, E Landgraf, D Wenzel, D Etzrodt

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 6.70 MB

english, 1999

10

A novel silicon surface micromachining angle sensor

Jörg R. Kaienburg, Ralf Schellin

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.90 MB

english, 1999

11

A micro cell lysis device

Sang-Wook Lee, Yu-Chong Tai

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.43 MB

english, 1999

12

Sensors and actuators on non-planar substrates

Wen J. Li, John D. Mai, Chih-Ming Ho

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.82 MB

english, 1999

13

5×5 2D AFM cantilever arrays a first step towards a Terabit storage device

M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu, C. Quate

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.08 MB

english, 1999

14

Fabrication of free standing structure using single step electrochemical etching in hydrofluoric acid

H. Ohji, P.J. Trimp, P.J. French

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 5.18 MB

english, 1999

15

Laminar fluid behavior in microchannels using micropolar fluid theory

Ian Papautsky, John Brazzle, Timothy Ameel, A.Bruno Frazier

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.56 MB

english, 1999

16

Capacitive type surface-micromachined silicon accelerometer with stiffness tuning capability

Kyu-Yeon Park, Chong-Won Lee, Hyun-Suk Jang, Yongsoo Oh, Byeoungju Ha

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.10 MB

english, 1999

17

Integrated silica micro-opto-electromechanical steering device for laser beam scanning

Karine Petroz, Eric Ollier, Henri Grateau, Patrick Mottier

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.35 MB

english, 1999

18

Contact measurements providing basic design data for microrelay actuators

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 280 KB

english, 1999

19

Application of sol–gel deposited thin PZT film for actuation of 1D and 2D scanners

A. Schroth, C. Lee, S. Matsumoto, R. Maeda

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 6.17 MB

english, 1999

20

A highly flexible design and production framework for modularized microelectromechanical systems

M. Schuenemann, V. Grosser, R. Leutenbauer, G. Bauer, W. Schaefer, H. Reichl

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 7.53 MB

english, 1999

21

Flow control by using high-aspect-ratio, in-plane microactuators

Faiz Sherman, Steve Tung, Chang-Jin Kim, Chih-Ming Ho, Jason Woo

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 3.31 MB

english, 1999

22

Micromachining by ion track lithography

Greger Thornell, Reimar Spohr, Elbert Jan van Veldhuizen, Klas Hjort

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.01 MB

english, 1999

23

Micromachined membrane particle filters

Xing Yang, Joon Mo Yang, Yu-Chong Tai, Chih-Ming Ho

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.81 MB

english, 1999

24

Roughening of single-crystal silicon surface etched by KOH water solution

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Masaki Tsunekawa, Shunji Ito

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 5.28 MB

english, 1999

25

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Kazuo Asaumi, Yasuroh Iriye, Masaharu Yamamoto

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.11 MB

english, 1999

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