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Integrated silica micro-opto-electromechanical steering device for laser beam scanning
Karine Petroz, Eric Ollier, Henri Grateau, Patrick MottierVolume:
73
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(98)00263-5
File:
PDF, 2.35 MB
english, 1999