A highly flexible design and production framework for modularized microelectromechanical systems
M. Schuenemann, V. Grosser, R. Leutenbauer, G. Bauer, W. Schaefer, H. ReichlVolume:
73
Year:
1999
Language:
english
Pages:
16
DOI:
10.1016/s0924-4247(98)00266-0
File:
PDF, 7.53 MB
english, 1999