Micromachined membrane particle filters

Sensors and Actuators A: Physical 1999 Vol. 73; Iss. 1-2

Micromachined membrane particle filters

Xing Yang, Joon Mo Yang, Yu-Chong Tai, Chih-Ming Ho
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Volume:
73
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(98)00269-6
File:
PDF, 2.81 MB
english, 1999
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