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Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries
C Malhaire, M Le Berre, D Febvre, D Barbier, P PinardVolume:
74
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00312-4
File:
PDF, 181 KB
english, 1999