Volume 74; Issue 1-3

Sensors and Actuators A: Physical

Volume 74; Issue 1-3

1

Silicon compatible materials for harsh environment sensors

Gerhard H. Kroetz, Martin H. Eickhoff, Helmut Moeller

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.04 MB

english, 1999

2

A thermoelectric converter for energy supply

H Glosch, M Ashauer, U Pfeiffer, W Lang

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.26 MB

english, 1999

3

Microstructuring of organic layers for microsystems

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 246 KB

english, 1999

4

Integration of a sensitive material to a silicon-based device for CO detection

O. Renault, D. Briand, G. Delabouglise, J.F. Currie, M. Labeau

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.15 MB

english, 1999

5

Ozone detection using low-power-consumption metal–oxide gas sensors

Th Becker, L Tomasi, Chr Bosch-v.Braunmühl, G Müller, G Sberveglieri, G Fagli, E Comini

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 334 KB

english, 1999

6

A high temperature pressure sensor prepared by selective deposition of cubic silicon carbide on SOI substrates

M. Eickhoff, H. Möller, G. Kroetz, J. v. Berg, R. Ziermann

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 3.15 MB

english, 1999

7

Piezoelectric properties of PZT films for microcantilever

E. Cattan, T. Haccart, G. Vélu, D. Rémiens, C. Bergaud, L. Nicu

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 741 KB

english, 1999

8

Low temperature crystallised Ti-rich NiTi shape memory alloy films for microactuators

J.-L. Seguin, M. Bendahan, A. Isalgue, V. Esteve-Cano, H. Carchano, V. Torra

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 186 KB

english, 1999

9

New metallurgical systems for electronic soldering applications

C Gonçalves, J Ferreira, E Fortunato, I Ferreira, R Martins, A.P Marvão, J.I Martins, T Harder, R Oppelt

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 579 KB

english, 1999

10

Dynamic determination of Young's modulus of electroplated nickel used in LIGA technique

H Majjad, S Basrour, P Delobelle, M Schmidt

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 266 KB

english, 1999

11

Microstructure of Cu–C interface in Cu-based metal matrix composite

A. Berner, K.C. Mundim, D.E. Ellis, S. Dorfman, D. Fuks, R. Evenhaim

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.46 MB

english, 1999

12

Characterization of the nonlinear optical properties of crystals by the SHEW technique

R Kremer, A Boudrioua, J.C Loulergue

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 266 KB

english, 1999

13

Scanning acoustic microscopy: a tool for measuring crosslinking gradients in photopolymer materials

L Simonin, D.J Lougnot

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 985 KB

english, 1999

14

Wafer bonding for microsystems technologies

U. Gösele, Q.-Y. Tong, A. Schumacher, G. Kräuter, M. Reiche, A. Plößl, P. Kopperschmidt, T.-H. Lee, W.-J. Kim

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 492 KB

english, 1999

15

β-SiC on SiO2 formed by ion implantation and bonding for micromechanics applications

C. Serre, A. Romano-Rodrı́guez, A. Pérez-Rodrı́guez, J.R. Morante, L. Fonseca, M.C. Acero, R. Kögler, W. Skorupa

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 324 KB

english, 1999

16

Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries

C Malhaire, M Le Berre, D Febvre, D Barbier, P Pinard

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 181 KB

english, 1999

17

Optimizing photodiode arrays for the use as retinal implants

M.B. Schubert, A. Hierzenberger, H.J. Lehner, J.H. Werner

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 912 KB

english, 1999

18

Investigation of MIS gas sensitive structures with Pd and Pd/Cu metal layers

V.G. Litovchenko, T.I. Gorbanyuk, A.A. Efremov, A.A. Evtukh, D. Schipanski

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 153 KB

english, 1999

19

Microstructures of the monomorph piezoelectric ceramic actuators with functional gradients

Xinhua Zhu, Jianmin Zhu, Shunhua Zhou, Qi Li, Zhiguo Liu

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 732 KB

english, 1999

20

Obtention and characterization of bioengineered layers onto silica-based microstructures

S. Falipou, J.M. Chovelon, C. Martelet, J. Margonari, D. Cathignol

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.60 MB

english, 1999

21

Micromachined switches for low electric loads

K. Hiltmann, W. Keller, W. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 741 KB

english, 1999

22

Micromachined chemical reaction system

M. Koch, C.G.J. Schabmueller, A.G.R. Evans, A. Brunnschweiler

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.64 MB

english, 1999

23

Pyrotechnic actuator: a new generation of Si integrated actuator

Carole Rossi, Daniel Estève, Corinne Mingués

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 533 KB

english, 1999

24

Mixed ionic–electronic conducting thin-films of CuBr: a new active component for gas sensors?

J.-L Seguin, M Bendahan, P Lauque, C Jacolin, M Pasquinelli, P Knauth

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 503 KB

english, 1999

25

Electrostatically actuated micromirror devices in silicon technology

W. Lang, H. Pavliček, Th. Marx, H. Scheithauer, B. Schmidt

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 341 KB

english, 1999

26

Micromachining of an air-bridge structure using thin-films on glass substrates

M. Boucinha, V. Chu, J.P. Alpuim, J.P. Conde

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 642 KB

english, 1999

27

Permalloy electroplating through photoresist molds

Jean-Marie Quemper, S. Nicolas, J.P. Gilles, J.P. Grandchamp, A. Bosseboeuf, T. Bourouina, E. Dufour-Gergam

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.84 MB

english, 1999

28

Porous silicon as substrate for ion sensors

M. Ben Ali, R. Mlika, H. Ben Ouada, R. M'ghaı̈eth, H. Maâref

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 69 KB

english, 1999

29

Plasma enhanced chemical vapor deposition silicon oxynitride optimized for application in integrated optics

K. Wörhoff, A. Driessen, P.V. Lambeck, L.T.H. Hilderink, P.W.C. Linders, Th.J.A. Popma

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 122 KB

english, 1999

30

Recent advances in silicon etching for MEMS using the ASE™ process

A.M. Hynes, H. Ashraf, J.K. Bhardwaj, J. Hopkins, I. Johnston, J.N. Shepherd

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 632 KB

english, 1999

31

Roughning and smoothing dynamics during KOH silicon etching

Ralu Divan, N Moldovan, H Camon

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.50 MB

english, 1999

32

Permeated porous silicon for hydrocarbon sensor fabrication

R. Angelucci, A. Poggi, L. Dori, G.C. Cardinali, A. Parisini, A. Tagliani, M. Mariasaldi, F. Cavani

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.21 MB

english, 1999

33

Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems

Paula Obreja, Raluca Muller, Elena Manea

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 211 KB

english, 1999

34

Thick oxidised porous silicon layers for the design of a biomedical thermal conductivity microsensor

Ph. Roussel, V. Lysenko, B. Remaki, G. Delhomme, A. Dittmar, D. Barbier

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 213 KB

english, 1999

35

Multilayer structures deposited by laser ablation

M. Dinescu, C. Stanciu, D. Ghica, R. Dinu, V. Sandu, N. Nastase, M. Balucani, V. Bondarenko, L. Frachina, G. Lamedica, A. Ferrari

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.19 MB

english, 1999

36

Porous silicon technique for realization of surface micromachined silicon structures with large gaps

Hans Artmann, Wilhelm Frey

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.30 MB

english, 1999

37

Femtosecond laser-based technology for fast development of micromechanical devices

R. Bähnisch, W. Groß, J. Staud, A. Menschig

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.86 MB

english, 1999

38

Single step electrochemical etching in ammonium fluoride

H. Ohji, P.J. French

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.00 MB

english, 1999

39

Selection of materials for reduced stress packaging of a microsystem

A. Morrissey, G. Kelly, J. Alderman

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 230 KB

english, 1999

40

Improved simulation for strongly coupled micro-electro-mechanical systems: resonant vacuum sensor optimization

B. Folkmer, A. Siber, W.Großse Bley, H. Sandmaier, W. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.10 MB

english, 1999

41

Breaking the isotropy of porous silicon formation by means of current focusing

A. Zeitschel, A. Friedberger, W. Welser, G. Müller

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.43 MB

english, 1999

42

Galvanic porous silicon formation without external contacts

C.M.A Ashruf, P.J French, P.M.M.C Bressers, J.J Kelly

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 817 KB

english, 1999

43

Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition

F. Craciun, P. Verardi, M. Dinescu, C. Galassi, A. Costa

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.69 MB

english, 1999

44

Pulsed laser deposition of multilayer TiN/Pb(ZrxTi1−x)O3 for piezoelectric microdevices

P. Verardi, M. Dinescu, F. Craciun, R. Dinu, V. Sandu, L. Tapfer, A. Cappello

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 100 KB

english, 1999

45

Micromachining of magnetic materials

Arvi Kruusing, Seppo Leppävuori, Antti Uusimäki, Bronius Petrêtis, Olga Makarova

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 7.31 MB

english, 1999

46

Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture

P. Temple-Boyer, B. Hajji, J.L. Alay, J.R. Morante, A. Martinez

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 130 KB

english, 1999

47

Characterization and modeling of a CMOS-compatible MEMS technology

Laurent Latorre, Pascal Nouet, Yves Bertrand, Philippe Hazard, Francis Pressecq

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 520 KB

english, 1999

48

The culture of neurons on silicon

S.C Bayliss, L.D Buckberry, I Fletcher, M.J Tobin

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 5.05 MB

english, 1999

49

Determination of micromechanical properties of thin films by beam bending measurements with an atomic force microscope

C. Serre, A. Pérez-Rodrı́guez, J.R. Morante, P. Gorostiza, J. Esteve

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 687 KB

english, 1999

50

Evaluation of mechanical materials properties by means of surface micromachined structures

Jan-Åke Schweitz, Fredric Ericson

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.93 MB

english, 1999

51

Some particular aspects of the thin membrane by boron diffusion processes

Elena Manea, Raluca Muller, Alina Popescu

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.51 MB

english, 1999

52

NiTi thin films as a gate of M.O.S. capacity sensors

Marc Bendahan, Khalifa Aguir, Jean-Luc Seguin, Hervé Carchano

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 138 KB

english, 1999

53

Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin films

Emmanuel Defaÿ, Bachir Semmache, Christiane Dubois, Martine LeBerre, Daniel Barbier

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 154 KB

english, 1999

54

Index

Journal:

Sensors and Actuators A: Physical

Year:

1999

File:

PDF, 36 KB

1999

55

Index

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 58 KB

english, 1999

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