Permalloy electroplating through photoresist molds

Sensors and Actuators A: Physical 1999 Vol. 74; Iss. 1-3

Permalloy electroplating through photoresist molds

Jean-Marie Quemper, S. Nicolas, J.P. Gilles, J.P. Grandchamp, A. Bosseboeuf, T. Bourouina, E. Dufour-Gergam
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Volume:
74
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00323-9
File:
PDF, 1.84 MB
english, 1999
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