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Permeated porous silicon for hydrocarbon sensor fabrication
R. Angelucci, A. Poggi, L. Dori, G.C. Cardinali, A. Parisini, A. Tagliani, M. Mariasaldi, F. CavaniVolume:
74
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(98)00328-8
File:
PDF, 2.21 MB
english, 1999