Silicon elastomer as a protective layer in 3D...

Sensors and Actuators A: Physical 1999 Vol. 74; Iss. 1-3

Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems

Paula Obreja, Raluca Muller, Elena Manea
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Volume:
74
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0924-4247(98)00329-x
File:
PDF, 211 KB
english, 1999
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