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Thick oxidised porous silicon layers for the design of a biomedical thermal conductivity microsensor
Ph. Roussel, V. Lysenko, B. Remaki, G. Delhomme, A. Dittmar, D. BarbierVolume:
74
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00330-6
File:
PDF, 213 KB
english, 1999