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Femtosecond laser-based technology for fast development of micromechanical devices
R. Bähnisch, W. Groß, J. Staud, A. MenschigVolume:
74
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00333-1
File:
PDF, 1.86 MB
english, 1999