Determination of micromechanical properties of thin films by beam bending measurements with an atomic force microscope
C. Serre, A. Pérez-Rodrı́guez, J.R. Morante, P. Gorostiza, J. EsteveVolume:
74
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(98)00347-1
File:
PDF, 687 KB
english, 1999