![](/img/cover-not-exists.png)
Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection
Thierry Corman, Peter Enoksson, Göran StemmeVolume:
66
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(98)80019-8
File:
PDF, 767 KB
english, 1998