Measurement of the effective transverse piezoelectric...

Sensors and Actuators A: Physical 1999 Vol. 77; Iss. 2

Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

Marc-Alexandre Dubois, Paul Muralt
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Volume:
77
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(99)00070-9
File:
PDF, 1.13 MB
english, 1999
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