Volume 77; Issue 2

1

Strain studies in LPCVD polysilicon for surface micromachined devices

Year:
1999
Language:
english
File:
PDF, 371 KB
english, 1999
6

Ozone sensor made by dip coating method

Year:
1999
Language:
english
File:
PDF, 431 KB
english, 1999
9

A miniature shape memory alloy pinch valve

Year:
1999
Language:
english
File:
PDF, 304 KB
english, 1999
10

Micro-stereolithography of polymeric and ceramic microstructures

Year:
1999
Language:
english
File:
PDF, 4.10 MB
english, 1999