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Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon
A.M Fitzgerald, R.H Dauskardt, T.W KennyVolume:
83
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(99)00383-0
File:
PDF, 584 KB
english, 2000