Effects of Si-doping on structural and electrical characteristics of polar, semi-polar, and non-polar AlGaN epi-layers
Wang, Yi, Zhang, Xiong, Luan, Huakai, Yang, Hongquan, Wang, Shuchang, Dai, Qian, Wu, Zili, Cui, YipingVolume:
42
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.11.003
Date:
February, 2016
File:
PDF, 2.29 MB
english, 2016