Study of Al diffusion in GaN during metal organic vapor...

Materials Science in Semiconductor Processing 2016 / 02 Vol. 42

Study of Al diffusion in GaN during metal organic vapor phase epitaxy of AlGaN/GaN and AlN/GaN structures

Chaaben, N., Laifi, J., Bouazizi, H., Saidi, C., Bchetnia, A., El Jani, B.
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Volume:
42
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.11.008
Date:
February, 2016
File:
PDF, 1.41 MB
english, 2016
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