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Correlation between the microstructure and optical properties of carbon nitride films deposited by rf magnetron sputtering
O. Durand-Drouhin, M. Lejeune, M. Clin, J. HenocqueVolume:
4
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s1369-8001(00)00098-6
File:
PDF, 194 KB
english, 2001