Composition analysis of oxidized buried SiC layers in silicon from EFTEM images
W. Attenberger, J.K.N. Lindner, M. Schmid, J.W. Gerlach, B. StritzkerVolume:
4
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s1369-8001(00)00134-7
File:
PDF, 131 KB
english, 2001