Characterization and production metrology of gate dielectric films
Alain C. Diebold, Jesse Canterbury, Will Chism, Curt Richter, Nhan Nguyen, Jim Ehrstein, Chad WeintraubVolume:
4
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s1369-8001(00)00153-0
File:
PDF, 188 KB
english, 2001