Defect transformation study in silicon-on-insulator...

Materials Science in Semiconductor Processing 2001 Vol. 4; Iss. 1-3

Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction

V.P. Popov, I.V. Antonova, J. Bak-Misiuk, J. Domagala
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Volume:
4
Year:
2001
Language:
english
Pages:
3
DOI:
10.1016/s1369-8001(00)00157-8
File:
PDF, 130 KB
english, 2001
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