Zn distribution and location, luminescence measurement...

Materials Science in Semiconductor Processing 2003 Vol. 6; Iss. 4

Zn distribution and location, luminescence measurement after Zn channeled implantation in GaN and RTA annealing

F.-R. Ding, A. Vantomme, W.-H. He, Q. Zhao, B. Pipeleers, K. Jacobs, I. Moerman, K. Iakoubovskii, G.J. Adriaenssens
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Volume:
6
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/s1369-8001(03)00086-6
File:
PDF, 114 KB
english, 2003
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