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{3 1 1} Defect evolution in Si-implanted Si1−xGex alloys
Robert T. Crosby, Kevin S. Jones, Mark E. Law, A.Nylandsted Larsen, J.Lundsgaard HansenVolume:
6
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s1369-8001(03)00087-8
File:
PDF, 174 KB
english, 2003