Yield Prediction Through the Event Sequence Analysis of the...

Yield Prediction Through the Event Sequence Analysis of the Die Attach Process

Lee, Hoyeop, Kim, Chang Ouk, Ko, Hyo Heon, Kim, Min-Kyoon
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Volume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2015.2487540
Date:
November, 2015
File:
PDF, 1.39 MB
english, 2015
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