Yield Prediction Through the Event Sequence Analysis of the Die Attach Process
Lee, Hoyeop, Kim, Chang Ouk, Ko, Hyo Heon, Kim, Min-KyoonVolume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2015.2487540
Date:
November, 2015
File:
PDF, 1.39 MB
english, 2015