Design and fabrication of suspended Si3N4 nanobeam cavities

Microelectronic Engineering 2016 / 06 Vol. 159

Design and fabrication of suspended Si3N4 nanobeam cavities

Athanasekos, Loukas, Christofi, Aristi, Gantzounis, Georgios, Bolomyti, Eftychia, Papageorgiou, George, Skoulikidou, Maria-Christina, Raptis, Ioannis, Papanikolaou, Nikolaos
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Volume:
159
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.02.040
Date:
June, 2016
File:
PDF, 945 KB
english, 2016
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