Microelectronic Engineering

1

Investigation of lattice distortion of Co3O4 nanoparticles prepared by a carbon-assisted method

Tong, Xiaogang, Hai, Zhenyin, Cui, Danfeng, Gao, Libo, Zhang, Qiang, Xu, Hongyan, Ma, Yating, Xue, Chenyang, Liu, Jun

Journal:

Year:

2016

Language:

english

File:

PDF, 862 KB

english, 2016

2

Design and fabrication of suspended Si3N4 nanobeam cavities

Athanasekos, Loukas, Christofi, Aristi, Gantzounis, Georgios, Bolomyti, Eftychia, Papageorgiou, George, Skoulikidou, Maria-Christina, Raptis, Ioannis, Papanikolaou, Nikolaos

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 945 KB

english, 2016

3

Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope

Niesel, Thalke, Dietzel, Andreas

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.66 MB

english, 2016

4

A plate-type thermoelectric power generator with an oxidized bi-metal interface for power generation from a small temperature difference

Tohmyoh, Hironori, Daimon, Toshinori

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.20 MB

english, 2016

5

Dual photonic–phononic nanocavities for tailoring the acousto-optic interaction

Papanikolaou, Nikolaos, Almpanis, Evangelos, Gantzounis, George, Christofi, Aristi, Athanasekos, Loukas, Stefanou, Nikolaos

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 483 KB

english, 2016

6

NV-center diamond cantilevers: Extending the range of available fabrication methods

Kleinlein, J., Borzenko, T., Münzhuber, F., Brehm, J., Kiessling, T., Molenkamp, L.W.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 941 KB

english, 2016

7

Designing width-modulated Si nanowires for enhanced thermoelectric efficiency

Zianni, Xanthippi

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 750 KB

english, 2016

8

Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

Hantschel, T., Tsigkourakos, M., Zha, L., Nuytten, T., Paredis, K., Majeed, Bivragh, Vandervorst, W.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.86 MB

english, 2016

9

Charge retention analysis of Si implanted and wet oxidized SONOS structures

Bolomyti, E., Glezos, N., Dimitrakis, P., Normand, P., Benassayg, G., Ioannou-Sougleridis, V.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.26 MB

english, 2016

10

Interface properties of Al–Al2O3–Ge MIS capacitors and the effect of forming gas annealing

Ioannou-Sougleridis, V., Karageorgiou, A., Barlas, M., Ladas, S., Skarlatos, D.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 2.38 MB

english, 2016

11

MANOS performance dependence on ALD Al2O3 oxidation source

Nikolaou, Nikolaos, Dimitrakis, Panagiotis, Normand, Pascal, Speliotis, Thanassis, Kukli, Kaupo, Niinistö, Jaakko, Mizohata, Kenichiro, Ritala, Mikko, Leskelä, Markku, Ioannou-Sougleridis, Vassilios

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.89 MB

english, 2016

12

Biocompatibility and implant of a less invasive intraocular pressure sensor

Carrasco, Félix Gil, Alonso, Daniela Díaz, Niño-de-Rivera, Luis

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.50 MB

english, 2016

13

Graphene transfer methods for the fabrication of membrane-based NEMS devices

Wagner, S., Weisenstein, C., Smith, A.D., Östling, M., Kataria, S., Lemme, M.C.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.02 MB

english, 2016

14

Characterization of half-pitch 15-nm metal wire circuit fabricated by directed self-assembly of polystyrene-block-poly(methyl methacrylate)

Kasahara, Yusuke, Seino, Yuriko, Sato, Hironobu, Kanai, Hideki, Kobayashi, Katsutoshi, Kubota, Hitoshi, Miyagi, Ken, Minegishi, Shinya, Kodera, Katsuyoshi, Kihara, Naoko, Nomura, Satoshi, Tobana, Tosh

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 2.89 MB

english, 2016

15

Top-down fabrication optimisation of ZnO nanowire-FET by sidewall smoothing

Ghazali, N.A.B., Ebert, M., Ditshego, N.M.J., de Planque, M.R.R., Chong, H.M.H.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.79 MB

english, 2016

16

Interface state density dependence on detection process in single electron photo-detector (photo-SET)

Bargaoui, Y., Troudi, M., Sghaier, N., Yacoubi, N., Aimez, V., Souifi, A.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 766 KB

english, 2016

17

A high-current scanning electron microscope with multi-beam optics

Doi, Takashi, Yamazaki, Minoru, Ichimura, Takashi, Ren, Yan, Kruit, P.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.45 MB

english, 2016

18

Complex permittivity of semiconductor device under DC bias

Li, Yun, Su, Ping, Gao, Shengkai, Shen, Qianfeng, Gong, Min

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 848 KB

english, 2016

19

Mechanical characterisation of nanocrystalline graphite using micromechanical structures

Fishlock, S.J., Grech, D., McBride, J.W., Chong, H.M.H., Pu, S.H.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.01 MB

english, 2016

20

De-embedding techniques for nanoscale characterization of semiconductors by scanning microwave microscopy

Michalas, L., Brinciotti, E., Lucibello, A., Gramse, G., Joseph, C.H., Kienberger, F., Proietti, E., Marcelli, R.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.01 MB

english, 2016

21

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh, D., Groenesteijn, J., Wiegerink, R.J., Lötters, J.C.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 2.02 MB

english, 2016

22

Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Wood, Graham S., Zhao, Chun, Pu, Suan Hui, Boden, Stuart A., Sari, Ibrahim, Kraft, Michael

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.26 MB

english, 2016

23

Resistive switching characteristics in hafnium oxide, tantalum oxide and bilayer devices

Park, Mi Ra, Abbas, Yawar, Abbas, Haider, Hu, Quanli, Lee, Tae Sung, Choi, Young Jin, Yoon, Tae-Sik, Lee, Hyun-Ho, Kang, Chi Jung

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 619 KB

english, 2016

24

Poisson-Schroedinger-Continuity two-dimensional analysis of both short (ballistic) and long (drift-diffusion) III–V FETs

Gili, A., Sarras, S., Xanthakis, J.P.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 903 KB

english, 2016

25

Electrical characteristics of bendable a-IGZO thin-film transistors with split channels and top-gate structure

Oh, Hyungon, Cho, Kyoungah, Park, Sukhyung, Kim, Sangsig

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.31 MB

english, 2016

26

Effects of control oxide material on the charging times of metal nanoparticles inside non-volatile memories: A 3-dimensional WKB calculation

Anastasopoulos, A., Kyritsakis, A., Beniakar, M., Xanthakis, J.P.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 801 KB

english, 2016

27

Sputtered tungsten–silver and tungsten–aluminium thin films for non-volatile magnetic memories applications

Kaidatzis, Andreas, Psycharis, Vassilios, Niarchos, Dimitrios

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.21 MB

english, 2016

28

A capacitive surface stress biosensor for CSFV detection

Tian, Jianyan, Bai, Yang, Tang, Xiaoliang, Sang, Shengbo, Wang, Fang

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.28 MB

english, 2016

29

Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications

Giebel, F.J., Köhle, M., Czyba, P., Kolander, K.J., Kallis, K.T., Zimmer, C.M., Fiedler, H.L.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.15 MB

english, 2016

30

Structure stability of high aspect ratio Ti/Au two-layer cantilevers for applications in MEMS accelerometers

Teranishi, Minami, Chang, Tso-Fu Mark, Chen, Chun-Yi, Konishi, Toshifumi, Machida, Katsuyuki, Toshiyoshi, Hiroshi, Yamane, Daisuke, Masu, Kazuya, Sone, Masato

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 1.19 MB

english, 2016

31

Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film

Birmpiliotis, D., Czarnecki, P., Koutsoureli, M., Papaioannou, G., De Wolf, I.

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 830 KB

english, 2016

32

Integrated smart gas flow sensor with 2.6mW total power consumption and 80dB dynamic range

Piotto, Massimo, Del Cesta, Francesco, Bruschi, Paolo

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 979 KB

english, 2016

33

Editorial Board

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 33 KB

english, 2016

34

Publisher's note

Journal:

Microelectronic Engineering

Year:

2016

File:

PDF, 87 KB

2016

36

Editorial

Wiegerink, Remco, Staufer, Urs, Tsoukalas, Dimitris

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 124 KB

english, 2016

37

Author Index

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 114 KB

english, 2016

Volume 159

Investigation of lattice distortion of Co3O4 nanoparticles prepared by a carbon-assisted method

Design and fabrication of suspended Si3N4 nanobeam cavities

Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope

A plate-type thermoelectric power generator with an oxidized bi-metal interface for power generation from a small temperature difference

Dual photonic–phononic nanocavities for tailoring the acousto-optic interaction

NV-center diamond cantilevers: Extending the range of available fabrication methods

Designing width-modulated Si nanowires for enhanced thermoelectric efficiency

Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

Charge retention analysis of Si implanted and wet oxidized SONOS structures

Interface properties of Al–Al2O3–Ge MIS capacitors and the effect of forming gas annealing

MANOS performance dependence on ALD Al2O3 oxidation source

Biocompatibility and implant of a less invasive intraocular pressure sensor

Graphene transfer methods for the fabrication of membrane-based NEMS devices

Characterization of half-pitch 15-nm metal wire circuit fabricated by directed self-assembly of polystyrene-block-poly(methyl methacrylate)

Top-down fabrication optimisation of ZnO nanowire-FET by sidewall smoothing

Interface state density dependence on detection process in single electron photo-detector (photo-SET)

A high-current scanning electron microscope with multi-beam optics

Complex permittivity of semiconductor device under DC bias

Mechanical characterisation of nanocrystalline graphite using micromechanical structures

De-embedding techniques for nanoscale characterization of semiconductors by scanning microwave microscopy

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Resistive switching characteristics in hafnium oxide, tantalum oxide and bilayer devices

Poisson-Schroedinger-Continuity two-dimensional analysis of both short (ballistic) and long (drift-diffusion) III–V FETs

Electrical characteristics of bendable a-IGZO thin-film transistors with split channels and top-gate structure

Effects of control oxide material on the charging times of metal nanoparticles inside non-volatile memories: A 3-dimensional WKB calculation

Sputtered tungsten–silver and tungsten–aluminium thin films for non-volatile magnetic memories applications

A capacitive surface stress biosensor for CSFV detection

Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications

Structure stability of high aspect ratio Ti/Au two-layer cantilevers for applications in MEMS accelerometers

Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film

Integrated smart gas flow sensor with 2.6mW total power consumption and 80dB dynamic range

Editorial Board

Table of Contents

Publisher's note

Editorial

Author Index