Fabrication of chamber for piezo inkjet printhead by SU-8...

Microsystem Technologies 2016 / 4 Vol. 22; Iss. 4

Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method

He, Jingzhi, Yin, Zhifu, Li, Chao, Wang, Wenqiang, Zou, Helin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2442-6
Date:
April, 2016
File:
PDF, 886 KB
english, 2016
Conversion to is in progress
Conversion to is failed