Comparison of Fin-Edge Roughness and Metal Grain Work...

IEEE Transactions on Electron Devices 2016 / 3 Vol. 63; Iss. 3

Comparison of Fin-Edge Roughness and Metal Grain Work Function Variability in InGaAs and Si FinFETs

Seoane, Natalia, Indalecio, Guillermo, Aldegunde, Manuel, Nagy, Daniel, Elmessary, Muhammad A., Garcia-Loureiro, Antonio J., Kalna, Karol
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Volume:
63
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2016.2516921
Date:
March, 2016
File:
PDF, 3.83 MB
english, 2016
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