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The analysis of internal transient flow and the performance of valveless piezoelectric micropumps with planar diffuser/nozzles elements
He, Xiuhua, Zhu, Jiawei, Zhang, Xitong, Xu, Liang, Yang, SongVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2695-0
Date:
January, 2017
File:
PDF, 7.14 MB
english, 2017