Uniformity Control of 3-D Stacked ICs: Optical Metrology...

IEEE Transactions on Semiconductor Manufacturing 2015 / 11 Vol. 28; Iss. 4

Uniformity Control of 3-D Stacked ICs: Optical Metrology and Statistical Analysis

Le Cunff, Delphine, Fresquet, Gilles, Raymond, Thierry, de Vries, Dirk K.
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Volume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2015.2468086
Date:
November, 2015
File:
PDF, 1.17 MB
english, 2015
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