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Interfacial characteristics of fully depleted SiGe-on-insulator (SGOI) substrate fabricated by modified Ge condensation
Di, Zengfeng, Zhang, Miao, Liu, Weili, Luo, Suhua, Song, Zhitang, Lin, Chenglu, Lin, Qing, Chu, Paul KVolume:
20
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/20/8/l02
Date:
August, 2005
File:
PDF, 331 KB
english, 2005