Electrical Characterization of Silicon-on-Insulator Wafers...

ECS Journal of Solid State Science and Technology 2016 Vol. 5; Iss. 4

Electrical Characterization of Silicon-on-Insulator Wafers Using Photo-Conductance Decay (PCD) Method

Arora, A., Drummond, P. J., Ruzyllo, J.
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Volume:
5
Year:
2016
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0121604jss
File:
PDF, 525 KB
english, 2016
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