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Precision positioning using a novel six axes compliant nano-manipulator
Akbari, Samin, Pirbodaghi, TohidVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2931-2
Date:
July, 2017
File:
PDF, 1.62 MB
english, 2017