Volume 23; Issue 7

Microsystem Technologies

Volume 23; Issue 7
1

Precision positioning using a novel six axes compliant nano-manipulator

Year:
2017
Language:
english
File:
PDF, 1.62 MB
english, 2017
13

Study on solving method for output signal of frequency resonant gyroscope

Year:
2017
Language:
english
File:
PDF, 1.84 MB
english, 2017
24

Design of a micro manipulation device for cell microinjection

Year:
2017
Language:
english
File:
PDF, 1.99 MB
english, 2017
29

A novel research on serpentine microchannels of passive micromixers

Year:
2017
Language:
english
File:
PDF, 1.05 MB
english, 2017
31

Optimization of structures of DC RF MEMS series switches for low actuation

Year:
2017
Language:
english
File:
PDF, 1.71 MB
english, 2017
41

Quantitative analysis of temperature effect on SOI piezoresistive pressure sensors

Year:
2017
Language:
english
File:
PDF, 843 KB
english, 2017
52

Warpage of embossed thermoplastic substrates and the effects on solvent bonding

Year:
2017
Language:
english
File:
PDF, 1.48 MB
english, 2017
56

Bistability in a symmetric out-of-plane microstructure

Year:
2017
Language:
english
File:
PDF, 1.38 MB
english, 2017
60

12-inch X-ray optics based on MEMS process

Year:
2017
Language:
english
File:
PDF, 2.87 MB
english, 2017